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Upgrade Kits for Used Semiconductor Equipment

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ALLWIN21 Corp.
[United States]

Address
220 Cochrane Circle sales@allwin21.com Morganhill sales@allwin21.com California
Phone
1-778-7788
Contact name
Peter Chen

Quick Information

  • Brand Name: Allwin21
  • Place of Origin: United States
  • Model Number : Upgrade Kits
  • :

Description

Please help fill in the upgrade kits RFQ at our website for suitable  configuration for your used semiconductor equipment . Appreciate your time.

 

Why upgrade your old used semiconductor process equipment ?

  1. Low cost solution of obsolete components and parts.
  2. Use new air cooling RF generator to replace the obsolete water cooling RF Generator, avoiding water flood in Fab/Lab.
  3. Use new integrated solid robotic wafer transfer to replace the obsolete index/frog robotic wafer transfer
  4. Requirement of stability of the system
  5. Requirement of network function (GEM/SECSII).
  6. Requirement of PC control for data storage.
  7. Requirement of GUI.
  8. Requirement of more precise control.
  9. Requirement of better repeatability, uniformity.
  10. Requirement of easier maintenance, calibration, and trouble shooting.

 

Allwin21 Corp. has been focusing on providing solutions and enhancements to the following used semiconductor equipment.  These OEM semiconductor equipment have been used in productions and R&D since 1990′s.  They’ve each been PROCESS-PROVEN.  Allwin21 Corp. can refurbish and/or upgrade these OEM systems with Allwin21′s comparable integrated process control system with PC, solid 3-axis robotic wafer transfer system (if applicable), and new critical components to achieve the goal of giving our customers a production edge with right cost.

We have been doing upgrade for many production proven equipment, such as Perkin-Elmer 2400, Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Matrix 105 , Matrix 106, Matrix 303, Matrix 303, Matrix 403, Matrix 205, Matrix 101, Matrix 102, Matrix 103, Matrix 104,Tegal 901e, Tegal 903e, Lam Research LAM AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690,  Branson/IPC 2000, Branson IPC 3000, Branson/IPC 4000, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510, Gasoncis Aura 1000, Gasonics AE 2001, AG Associates Heatpulse 610,  AG Associates Heatpulse 410, AG Associates Minipulse 310,   AG Associates Heatpulse 210 on the field for many cases. The reliability have been improved a lot for most of the tools after upgrading. We designed the upgrade kits for these working tools that can do plug and play and most of them only need 2 to 3 days include training. For PE sputter, since it is a little complicated, but we still target to upgrade within one week include training if the machine without other problems.


Upgraded Equipment Models :
  1. Heatpulse 210
  2. Heatpulse 410
  3. Heatpulse 610
  4. Perkin-Elmer 4400
  5. Perkin-Elmer 4410
  6. Perkin-Elmer 4450
  7. Perkin-Elmer 4480
  8. Perkin-Elmer 2400
  9. Matrix 105
  10. Matrix 106
  11. Matrix 101
  12. Matrix 102
  13. Matrix 103
  14. Matrix 104
  15. Matrix 111
  16. Matrix 10
  17. Matrix 205
  18. Matrix 303
  19. Matrix 403
  20. Tegal 901e
  21. Tegal 903e
  22. Gasonics Aura 1000
  23. Gasonics AE 2001
  24. Gasonics Aura 3010
  25. Gasonics 2000LL
  26. Gasonics L3510
  27. Lam AutoEtch 490
  28. Lam AutoEtch 590
  29. Lam AutoEtch 690
  30. Lam AutoEtch 790
  31. Lam AutoEtch 480
  32. Lam AutoEtch 580
  33. Lam AutoEtch 680
  34. Lam AutoEtch 780
  35. Branson/IPC 3000
  36. Branson/IPC 2000
  37. Branson/IPC 4000

Please find the info on our production proven equipment and upgrade kits.


  1. Allwin21 Brochures: Rapid Thermal Processors
  2. Allwin21 Brochures: Sputtering Deposition Equipment
  3. Allwin21 Brochures: Plasma Asher Descum Equipment 
  4. Allwin21 Brochures: Plasma Etcher RIE Equipment
  5. Allwin21 Brochures: Thin Film Metrology
  6. Allwin21 Brochures: Upgrade Kits 
  7. Allwin21 Brochures: All Products
  8. PPT on Why AccuThermo AW 610M RTP
  9. PPT on Why AccuThermo AW820M RTP
  10. PPT on Why AW-105R Plasma Asher Descum
  11. PPT on Why AW-B3000 Barrel Batch Manual Asher Descum
  12. PPT on Why AW-1008 Microwave Plasma Asher
  13. PPT on Why AccuSputter AW4450 Sputter Deposition Equipment
  14. PPT on Why AW-901eR AW-903eR Plasma Etcher
  15. PPT on Why AW-303R Plasma Etcher
  16. PPT on Why AWgage-150 AWgage-200 Metrology
  17. PPT on Upgrade Kit for Gasonics L3510
  18. PPT on Upgrade Kit for Gasonics Aura 1000
  19. PPT on Upgrade Kit for Gasonics Aura 3000 Gasonics Aura 3010
  20. PPT on Upgrade Kit for Gasonics Aura 2000LL
  21. PPT on Upgrade Kit for Gasonics AE 2000LL
  22. PPT on Upgrade Kit for Gasonics AE 2001
  23. PPT on Upgrade Kit for Tegal 901e Tegal 903e
  24. PPT on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790
  25. PPT on Upgrade Kit for Matrix 101,Matrix 102, Matrix 103,Matrix 104,Matrix 105,Matrix 106, Matrix 108,Matrix 205,Matrix 206, Matrix 208, Matrix 303,Matrix 403
  26. PPT on Upgrade Kits for Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000, Barrel Asher, Barrel Etch, Barrel Etcher
  27. Video on Why AccuThermo AW610M RTP
  28. Video on Why AccuThermo AW820M RTP
  29. Video on AccuThermo AW610
  30. Video on AW-105R Asher Descum
  31. Video on AW-1008 Plasma Asher 
  32. Video on AW-3000 Plasma Asher
  33. Video on AW-901eR AW-903eR Plasma Etch
  34. Video on AccuSputter AW4450 Sputter Deposition Equipment
  35. Video on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790



Packaging & Delivery

  • Packing :1
  • Packaging Size : 18 x 11 x 22  Inches
  • Package Weight : 44  Pounds
  • Delivery Lead Time : 4 weeks
  • Minimum Order : 1
  • Supply Ability : 200 units per year

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