Company Introduction

We focus on extending product lifecycle, providing solutions, and engineering enhancements to RTP,Asher,Etcher and Sputter.

Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Process tool. We are manufacturing the new AccuThermo AW Series Atmospheric and Vacuum Rapid Thermal Processors. Compared with traditional RTP systems, Allwin21s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies to achieve the BEST rapid thermal processing performance (repeatability, uniformity, and stability) with decades of research directly applicable to ours.

We focus on extending product lifecycle, providing solutions, and engineering enhancements to RTP,Sputter,Plasma Asher,Descum,Etcher semiconductor process equipment most directly related to III-V processing. These OEM semiconductor equipment have been used in production and R&D since the 1990s. They have proven processes and research. Allwin21 Corp. can customize these OEM systems with Allwin21s comparable integrated process control system with PC, solid robotic wafer transfer system, and new critical components. This is to achieve the goal of giving our customers a production edge, with right cost, and without having to worry about obsolete parts.

Main Products:

Rapid Thermal Process
AccuThermo AW610M
AccuThermo AW820M
AccuThermo AW820V

Sputter Deposition
AccuSputter AW4450

Plasma Ash/Descum
AW-105R
AW-1008
AW-B3000

Plasma Etch/RIE
AW-2001R
AW-901eR
AW-903eR
TTW AW-901eR
TTW AW-903eR

Metal Film Metrology
AWgage-150
AWgage-200

Upgrade Kits for Perkin-Elmer 2400, Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Matrix 105 , Matrix 106, Matrix 303, Matrix 303, Matrix 403, Matrix 205, Matrix 101, Matrix 102, Matrix 103, Matrix 104,Tegal 901e, Tegal 903e, Lam Research LAM AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Branson/IPC 2000, Branson IPC 3000, Branson/IPC 4000, Gasonics Aura 3000, Gasonics Aura 3010